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Yttrium Oxide

The surface morphology of the Y2O3 layer
Fig 1 The surface morphology of the Y2O3 layer
The same as in Fig 1 at the higher magnification. The particle size is ~30nm.
Fig 2 The same as in Fig 1 at the higher magnification. The particle size is ~30nm.
EDS spectrum of Y2O3 coating on SiO2 substrate.
Fig 3 EDS spectrum of Y2O3 coating on SiO2 substrate.
The cross-section through the coating at the end of the tube- 0.5µm.
Fig 4 The cross-section through the coating at the end of the tube- 0.5µm.
Additional area in sample at the end of the tube- dense uniform coating.
Fig 5 Additional area in sample at the end of the tube- dense uniform coating.
The cross-section of the central tube part. The Yttria layer thickness is ~0.75µm.
Fig 6 The cross-section of the central tube part. The Yttria layer thickness is ~0.75µm.

Report on Y2O3 Coating

Y2O3 coating on inner surface of quartz tube OD=25.4mm, ID=22mm.

The coating was examined by the following methods:

  • Surface morphology by HRSEM (High Resolution)
  • EDS analysis on the inner surface (Carbon coating for the analysis)
  • Metallographic cross-section (SEM Philips XL-30)

The results were as follows:

The surface morphology is shown in Figs 1, 2 and reveals dense coating of nano-sized crystals (~30nm). No pin-holes were revealed.

EDS (LINK ISIS) spectrum obtained in the middle of the tube is shown in Fig 3 and reveals 88wt% Y2O3+ 12wt% SiO2 (substrate). Since the depth of EDS analysis is ~ 1µm, there is the indication that Y2O3 layer thickness is close to 1µm.

Metallographic cross-section prepared at the end of the tube reveals dense, uniform coating of ~0.5µm - see arrows in Figs 4 and 5. No discontinuities or other defects were revealed at the quartz/Y2O3 layer interface. In the central part of the tube a coating thickness of ~0.75µm was observed, see Fig 6.

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