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Report on Y2O3 Coating:

  • Y2O3 coating on inner surface of quartz tube OD=25.4mm, ID=22mm

The coating was examined by the following methods:

  • Surface morphology by HRSEM (High Resolution)
  • EDS analysis on the inner surface (Carbon coating for the analysis)
  • Metallographic cross-section (SEM Philips XL-30)

The results were as follows:

  • The surface morphology is shown in Figs 1, 2 and reveals dense coating of nano-sized crystals (~30nm)
  • In Fig 2 is the same as in Fig 1 at the higher magnification. The particle size is ~30nm
Fig 1: The Surface Morphology of the Y2O3 Layer Fig 2: The Same as in Fig 1 at the Higher Magnification. The Particle Size is ~30nm

Fig 1: The Surface Morphology of the Y2O3 Layer

Fig 2: The Same as in Fig 1 at the Higher Magnification. The Particle Size is ~30nm

No pin-holes were revealed.

  • EDS (LINK ISIS) spectrum obtained in the middle of the tube is shown in Fig 3 and reveals 88wt% Y2O3+ 12wt% SiO2 (substrate)
  • Since the depth of EDS analysis is ~ 1µm, there is the indication that Y2O3 layer thickness is close to 1µm
  • Metallographic cross-section prepared at the end of the tube reveals dense, uniform coating of ~0.5µm - see arrows in Figs 4 and 5
  • No discontinuities or other defects were revealed at the quartz/Y2O3 layer interface
  • In the central part of the tube a coating thickness of ~0.75µm was observed, see Fig 6
Fig 3: EDS Spectrum of Y2O3 Coating on SiO2 Substrate Fig 4: The Cross-Section through the Coating at the end of the Tube- 0.5µm

Fig 3: EDS Spectrum of Y2O3 Coating on SiO2 Substrate

Fig 4: The Cross-Section through the Coating at the End of the Tube- 0.5µm

Fig 5: Additional Area in Sample at the End of the Tube - Dense Uniform Coating Fig 6: The Cross-Section of the Central Tube Part. The Yttria Layer Thickness is ~0.75µm

Fig 5: Additional Area in Sample at the End of the Tube - Dense Uniform Coating

Fig 6: The Cross-Section of the Central Tube Part. The Yttria Layer Thickness is ~0.75µm